LTS -20℃~80℃ Fluoride cooling and heating system

Temperature control during semiconductor manufacturing

Durchflusskontrolle12L/min~45L/min
Internal circulating liquid4L~10L
Ausdehnungsgefäß10L~20L
Ort der HerkunftChina

dynamisches Temperaturkontrollsystem Temperaturkontrolle von fluorierten Flüssigkeiten LTS-Reihe Halbleiter-Testkühler

Produktdaten herunterladen

Handbuch.pdf

Detaillierte Parameter

Modell	LTS-202	LTS-203	LTS-204	LTS-206	LTS-208
	LTS-202W	LTS-203W	LTS-204W	LTS-206W	LTS-208W
Temperaturbereich	-20℃～35℃
Genauigkeit der Temperaturregelung	±0.1℃ at -20℃～0℃
Durchflusskontrolle	7～25L/min		12～45L/min
	The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
Internal circulating fluid volume	4L	5L	6L	8L	10L
Volumen des Ausdehnungsgefäßes	10L	10L	15L	15L	20L
Anzeige des Systemdrucks	The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
	The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
Controller	PLC, Fuzzy-PID-Regelalgorithmus, mit Kaskadenregelalgorithmus
Temperature control	Modus der Regelung der Austrittstemperatur des Wärmeträgers
	External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
Brief der Vereinbarung	Ethernet-Schnittstelle TCP/IP-Protokoll
	RS485 Schnittstelle Modbus RTU Protokoll
Internal temperature feedback of equipment	Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
Geschlossenes Kreislaufsystem	The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
Kompressor	Emerson Copeland/Danfoss Scroll Flexible Compressor
Umwälzpumpe	Magnetic circulation pump
Verdampfer	Plattenwärmetauscher
Verflüssiger	Micro channel condenser (air-cooled)
	Plate heat exchanger (water-cooled), special attention: clean factory water is required
Kältetechnisches Zubehör	Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
Bedienfeld	LNEYA kundenspezifischer 7-Zoll-Farb-Touchscreen, Anzeige der Temperaturkurve\EXCEL-Datenexport
Sicherheit	With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
Größe der Eingangs- und Ausgangsschnittstelle	ZG1/2	ZG1/2	ZG3/4	ZG3/4	ZG3/4

Beschreibung des Produkts

It is widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.

1. The pressure holding test of the medium circulation system is 7 bar.
2. Use high-quality magnetic pump without mechanical shaft seal.
Optimieren Sie die Temperatur Abtastung und Reaktionsgeschwindigkeit, speziell Design Regelalgorithmus, kann schnell reagieren, um stabile Temperaturregelung.
4. Enhance the design of the circulating pump capacity to meet the high-lift requirements of the system.
5. Continuous high-temperature cooling technology meets the requirements for stable operation when heat is loaded on the heat sink plate and requires cooling and heating constant temperature control.
6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.

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