LNEYA Luftgekühlte Kältemaschine oder wassergekühlte Kältemaschine
LTS -40℃～35℃
Temperature control during semiconductor manufacturing- Durchflusskontrolle12L/min~45L/min
- Temperaturgenauigkeit±0.1℃ @40℃~-10℃
- Internal circulating liquid4L~10L
- Ausdehnungsgefäß10L~20L
- Ort der HerkunftChina
Produktdaten herunterladen
Detaillierte Parameter
|
Modell
|
LTS-402
|
LTS-403
|
LTS-404
|
LTS-406
|
LTS-408
|
|
LTS-402W
|
LTS-403W
|
LTS-404W
|
LTS-406W
|
LTS-408W
|
|
|
Temperaturbereich
|
-40℃～35℃
|
||||
|
Genauigkeit der Temperaturregelung
|
±0.1℃ -40℃～-10℃
|
||||
|
Durchflusskontrolle
|
7～25L/min
|
12～45L/min
|
|||
|
The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
|
|||||
|
Internal circulating fluid volume
|
4L
|
5L
|
6L
|
8L
|
10L
|
|
Volumen des Ausdehnungsgefäßes
|
10L
|
10L
|
15L
|
15L
|
20L
|
|
Anzeige des Systemdrucks
|
The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
|
||||
|
The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
|
|||||
|
Controller
|
PLC, Fuzzy-PID-Regelalgorithmus, mit Kaskadenregelalgorithmus
|
||||
|
Temperature control
|
Modus der Regelung der Austrittstemperatur des Wärmeträgers
|
||||
|
External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
|
|||||
|
Brief der Vereinbarung
|
Ethernet-Schnittstelle TCP/IP-Protokoll
|
||||
|
RS485 Schnittstelle Modbus RTU Protokoll
|
|||||
|
Internal temperature feedback of equipment
|
Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
|
||||
|
Geschlossenes Kreislaufsystem
|
The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
|
||||
|
Kompressor
|
Emerson Copeland/Danfoss Scroll Flexible Compressor
|
||||
|
Umwälzpumpe
|
Magnetic circulation pump
|
||||
|
Verdampfer
|
Plattenwärmetauscher
|
||||
|
Verflüssiger
|
Micro channel condenser (air-cooled)
|
||||
|
Plate heat exchanger (water-cooled), special attention: clean factory water is required
|
|||||
|
Kältetechnisches Zubehör
|
Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
|
||||
|
Bedienfeld
|
Wuxi Guanya customized 7-inch color touch screen, temperature curve display\EXCEL data export
|
||||
|
Sicherheit
|
With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
|
||||
|
Größe der Eingangs- und Ausgangsschnittstelle
|
ZG1/2
|
ZG1/2
|
ZG3/4
|
ZG3/4
|
ZG3/4
|
Beschreibung des Produkts
It is widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.
1. The pressure holding test of the medium circulation system is 7 bar.
2. Use high-quality magnetic pump without mechanical shaft seal.
Optimieren Sie die Temperatur Abtastung und Reaktionsgeschwindigkeit, speziell Design Regelalgorithmus, kann schnell reagieren, um stabile Temperaturregelung.
4. Enhance the design of the circulating pump capacity to meet the high-lift requirements of the system.
5. Continuous high-temperature cooling technology meets the requirements for stable operation when heat is loaded on the heat sink plate and requires cooling and heating constant temperature control.
6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.
Vielleicht interessieren Sie sich auch für diese Produkte
MD -75℃～225℃
INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …
-
YQH 0℃~-75℃
Genauigkeit der Temperatur ±0.1℃ Durchflusskontrolle 12~45/min
-
FLT-100℃~80℃ Niedertemperatur-Kaskade
Genauigkeit der Temperatur ±0.1℃ Durchflusskontrolle 12~45/min
-
FLTZ -30℃~40℃ Doppelte Frequenzumwandlung Serie
Genauigkeit der Temperatur ±0.1℃ Durchflusskontrolle 15~45/min 6bar max Leistungsbereich 380V 3,5kW
Laden...
已经是到最后一篇内容了！
